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Tel: 0551-63484895

After Sales: 4006082908

Headquarters address: No. 4708 Yungu Road, Economic and Technological Development Zone, Hefei City, Anhui Province, China

Produce address: Zhenping Technology Industrial Park, No. 4345 Tiandu Road, Hefei Economic and Technological Development Zone, Anhui Province, China

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Special vacuum baking pan furnace for graphite plate

Product introduction: The vacuum baking pan furnace is a furnace used in conjunction with MOCVD equipment. The furnace is evacuated, the workpiece to be processed is placed in the furnace, and the cleaning gas heating reaction method is used for dry cleaning (cleaning gas: N2, H2 ). It is mainly used to effectively remove gallium nitride and aluminum nitride on the MOCVD susceptor (SiC coated graphite disk or quartz disk), which can achieve the purpose of effective cleaning and improve product quality.

Keywords: Semiconductor specific equipment

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Description

(1) Product introduction: The vacuum baking pan furnace is a furnace used in conjunction with MOCVD equipment. The furnace is evacuated, the workpiece to be processed is placed in the furnace, and the cleaning gas heating reaction method is used for dry cleaning (cleaning gas: N2, H2 ). It is mainly used to effectively remove gallium nitride and aluminum nitride on the MOCVD susceptor (SiC coated graphite disk or quartz disk), which can achieve the purpose of effective cleaning and improve product quality.

(2)Technical parameters

Operating temperature

1450℃

maximum temperature

1500℃

insulation material

Graphite fiber blanket, graphite paper

muffle material

SUS304

Heating element

Graphite heating rod

cooling method

Air cooling + circulating air cooling

Temperature control stability

±2℃, with PID parameter self-tuning function

Furnace temperature uniformity

±5℃ (constant temperature 1550℃)

Temperature control thermocouple

S graduation

Maximum heating rate

15℃/min (no load)

Temperature control points

1 o'clock

cooling rate

1450℃ to 80℃, 240 minutes

Monitoring points

1 o'clock

ultimate vacuum

10-3torr level

atmosphere

Dry, clean, oil-free, high-purity nitrogen can be introduced into the furnace, with a purity of ≧99.999%

Pumping rate

Under no load, it reaches 10-2torr in 30 minutes.

Alarm protection

Sound and light alarm protection for over-temperature, couple failure, gas outage, etc.

Device color

Computer camel gray

power supply

Capacity greater than 160KVA, 3-phase 5-wire, 220/380VAC, 50Hz

Reference model

MOLKP-518
MOLKP-1000
MOLKP-1200

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