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Tel: 0551-63484895

After Sales: 4006082908

Headquarters address: No. 4708 Yungu Road, Economic and Technological Development Zone, Hefei City, Anhui Province, China

Produce address: Zhenping Technology Industrial Park, No. 4345 Tiandu Road, Hefei Economic and Technological Development Zone, Anhui Province, China

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Fully automatic SIC composite membrane vertical furnace

This product is mainly facing the field of SIC power device manufacturing. In the nitrogen atmosphere, the SIC/PI composite film is carbonized at 600-1050 ° C. During the carbonization process, the SIC nanoparticles and PI effects form a chemical bond, so that their heat resistance is obtained improve.

Keywords: Semiconductor specific equipment

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Description

Product Usage:

This product is mainly facing the field of SIC power device manufacturing. In the nitrogen atmosphere, the SIC/PI composite film is carbonized at 600-1050 ° C. During the carbonization process, the SIC nanoparticles and PI effects form a chemical bond, so that their heat resistance is obtained improve.

Features:

1. All -in -one man -machine operating system, continuous automation production, high work efficiency, saving labor costs, electrical energy and process time;

2. Fec heated, the temperature heating is rapid and uniform;

3. Quality stainless steel material, the surface is treated with physics and chemical polishing to ensure cleanliness;

4. Self -cleaning function -high temperature cleaning.

Technical Parameters:

Handle product

6/8inch Wafer

Processing

100PCS/Tube

Heaters

Round FeC heating board

Premium

2

Robotic

1

Temperature range

Long -term use temperature: 950 ℃, the highest temperature: 1200 ℃

Heating rate

<8℃/min

Cooling rate

<7℃/min

Heating power

30kW(Single furnace)

Heating temperature

3

Uniformity of furnace temperature

±2℃(950℃ constant temperature)

Temperature control

K -point

Temperature control method

SSR

Program control

P.I.D control

Furnace material

Quartz

Insulation Materials

Ceramic fiber

Atmosphere control

Multi-road traffic meter regulating air intake: flow measurement program: 1) 0-150L/min nitrogen 2) 0-40L/min oxygen

Atmosphere

N2/O2

Exhaust system

Set up exhaust chimneys on the top for exhaust gas emissions, recycling

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