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Tel: 0551-63484895

After Sales: 4006082908

Headquarters address: No. 4708 Yungu Road, Economic and Technological Development Zone, Hefei City, Anhui Province, China

Produce address: Zhenping Technology Industrial Park, No. 4345 Tiandu Road, Hefei Economic and Technological Development Zone, Anhui Province, China

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Full automatic vertical annealing furnace

It is used for IC integrated circuits, MEMS, electrical electronic devices, optoelectronic devices and other fields. It is mainly suitable for the alloy and annealing of the wafer of 6 ", 8", and 12 "wafers.

Keywords: Semiconductor specific equipment

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Description

Product Usage:

It is used for IC integrated circuits, MEMS, electrical electronic devices, optoelectronic devices and other fields. It is mainly suitable for the alloy and annealing of the wafer of 6 ", 8", and 12 "wafers.

The annealing is a process of getting into the inert gas (N2) under the low temperature conditions, eliminating the lattice defect and lattice damage of the silicon wafer interface, and optimizing the quality of the silicon wafer interface.

Features:

1. All -in -one man -machine operating system, continuous automation production, high work efficiency, saving labor costs, electrical energy and process time;

2. Fec heated, the temperature heating is rapid and uniform;

3. Quality stainless steel material, the surface is treated with physics and chemical polishing to ensure cleanliness;

Handle product

6/8/12inch Wafer

Processing

100PCS/Tube

Heaters

Round FeC heating board

Premium

2个 

Robotic

1

Temperature range

Long -term use temperature: 1050 ℃, the highest temperature: 1200 ℃

Heating rate

<10℃/min

Cooling rate

<5℃/min

Uniformity of furnace temperature

±℃(1050℃ Constant temperature)

Heating temperature

3

Temperature control method

SSR

Program control

P.I.D control

Furnace materia

Quartz

Insulation Materials

Ceramic fiber

Atmosphere control

Multi-road flowmeter regulates air intake, flow measurement program: 0-150L/min

Atmosphere

N2

Exhaust system

Set up exhaust chimneys on the top for exhaust gas emissions, recycling

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