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Tel: 0551-63484895

After Sales: 4006082908

Headquarters address: No. 4708 Yungu Road, Economic and Technological Development Zone, Hefei City, Anhui Province, China

Produce address: Zhenping Technology Industrial Park, No. 4345 Tiandu Road, Hefei Economic and Technological Development Zone, Anhui Province, China

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Fully automatic vacuum vertical oven

Fully automatic vacuum vertical oven

Keywords: Semiconductor specific equipment

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Description

(1) Product usage: used in semiconductor and pan-semiconductor processes such as low-temperature baking, drying, water removal, curing, and debinding in a vacuum environment.

(2) Product features:

2.1. Integrated human-machine operating system, continuous automated production, high work efficiency, saving labor costs, electricity and process time.

2.2. Ceramic fin heater, ring-shaped surrounding heating;

2.3 Ultimate vacuum degree: ≤10pa; optional (oxygen content index: ≤50ppm at normal temperature; ≤30ppm at high temperature)

(3)Technical parameters

Handling products

8/12inch wafer

Throughput

50PCS/tube 26PCS/tube

heater

Ceramic fin heater, ring-shaped surrounding heating

Feeding port

2/3/4

Manipulator

1/2

temperature range

Long-term use temperature: 300℃, maximum temperature: 350℃

Heating rate

<8℃/min

cooling rate

<3℃/min

heating power

13kW (single furnace)

Heating temperature zone

4

Furnace temperature uniformity

±2%℃ (200℃ constant temperature)

Temperature control thermocouple

K graduation

Temperature control method

SSR

Program control

PID control

atmosphere control

Multi-channel flow meter adjusts the inlet flow measurement range: 0-150L/min

atmosphere

N2

Exhaust system

Set up an exhaust chimney at the top for waste gas emission and recovery

(4)Control system

*The human-machine interface adopts touch screen mode

*The core controller adopts embedded controller

*Over-temperature protection is an independent detection device

*With oxygen content detection function

*Motion control is servo/stepper control unit

*Transmission is a professional wafer transfer robot

*The software has functions: temperature control, atmosphere control, process editing, data recording, and chart display.

 

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