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Tel: 0551-63484895

After Sales: 4006082908

Headquarters address: No. 4708 Yungu Road, Economic and Technological Development Zone, Hefei City, Anhui Province, China

Produce address: Zhenping Technology Industrial Park, No. 4345 Tiandu Road, Hefei Economic and Technological Development Zone, Anhui Province, China

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Fully automatic vertical stand tube furnace

Fully automatic vertical stand tube furnace

Keywords: Semiconductor specific equipment

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Description

(1) Product usage:

Integrated circuit wafer glue, BPO glue/PI glue/BCB glue curing, IC (wafer, CMOS, Bumping, TSV, MEMS, fingerprint recognition, IGBT); integrated circuit wafer rapid annealing furnace/alloy furnace

(2) Product features:

2.1. Integrated human-machine operating system, continuous automated production, high work efficiency, saving labor costs, electricity and process time.

2.2.FEC heating, rapid temperature rise and good uniformity

2.3. Comes with self-cleaning function - high temperature cleaning

(3)Technical parameters

Handling products

8/12inch wafer

Throughput

100pcs/tube, 75PCS/tube

heater

Round FEC heating plate

Feeding port

2/3/4

Manipulator

1/2

temperature range

Long-term use temperature: 350℃, maximum temperature: 750℃

Heating rate

<8℃/min

cooling rate

<7℃/min

heating power

30kW (single furnace)

Heating temperature zone

3pcs/tube

Furnace temperature uniformity

±2℃ (350℃ constant temperature)

Temperature control thermocouple

K graduation

Temperature control method

SSR

Program control

PID control

Furnace material

quartz

Insulation Materials

Ceramic fiber

atmosphere control

Multi-channel flow meter adjusts the air intake: flow measurement range:
1) 0-150L/min nitrogen 2) 0-40L/min oxygen

atmosphere

N2/O2

Exhaust system

Set up an exhaust chimney at the top for waste gas emission and recovery

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