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Fully vertical oxidation/diffusion furnace

It is mainly used in the fields of semiconductor integrated circuits, electric electronics (IGBT), micro -machine (MEMS), and photovoltaic batteries (Photovoltaic) manufacturing. It is suitable

Keywords: Semiconductor specific equipment

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Description

Usage introduction:

It is mainly used in the fields of semiconductor integrated circuits, electric electronics (IGBT), micro -machine (MEMS), and photovoltaic batteries (Photovoltaic) manufacturing. It is suitable

Product Features:

The diffusion/oxide furnace is an important process of semiconductor production. The diffusion is under high temperature conditions. Under high temperature conditions, the use of thermal diffusion principle is used to deeply incorporate the deep silicon substrate as required to make it have a specific concentration distribution to achieve the electrical characteristics of changing materials. The purpose of forming a semiconductor device structure. It can be used to make PN or forms of resistance, capacitors, diode and crystal tube in the integrated circuit. Oxidation is the process of placing the silicon wafer in the atmosphere of oxygen or water vapor. The process of forming an oxide film on the surface of the silicon wafer can be used as a blocking layer in injection and injection of penetration layer, surface passivation, and device structure. wait.

Features

Can meet the closed tube dry oxidation, wet oxygen oxidation, hydroxide synthesis oxidation technology.

Using high -reliability industrial control machine+PLC mode, fully automatically control the furnace temperature, entry and retreat, gas flow, and valve to achieve automation of all process processes;

With a friendly man -machine interface, users can easily modify the process control parameters and display various process status at any time;

There are a variety of craftsmanship, which is available for users to choose from;

It has powerful software functions and equipped with fault self -diagnosis software, which can greatly save maintenance time;

The constant temperature zone is automatically adjusted, string control, and can accurately control the actual process temperature of the reaction tube;

With over -temperature, disconnection, short circuit, process gas flow deviation alarm and protection function;

Products can be customized according to user requirements.

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