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Vertical furnace successfully delivered


Release time:

2023-09-20

Recently, our company successfully delivered a batch of fully automatic double-tube vertical furnaces to customers. This equipment was independently developed and produced by TRUE P Technology and has obtained a patent.

Vertical furnace successfully delivered

Recently, our company successfully delivered a batch of fully automatic double-tube vertical furnaces to customers. This equipment was independently developed and produced by Zhenping Technology and has obtained a patent.

The vertical furnace is a device that uses a microcomputer to control the temperature inside the furnace tube and fill it with nitrogen so that the wafer can bake and solidify PI glue in a clean space with high temperature and trace oxygen content. The product has a wide range of uses and is suitable for integrated circuit wafer glue, BPO glue/PI glue/BCB glue curing, IC (wafer, CMOS, Bumping, TSV, MENS, fingerprint identification; integrated circuit wafer rapid annealing, etc.

Its product features are:

1. Integrated human-machine operating system, continuous automated production, high work efficiency, saving labor costs, electricity and process time.

2. FEC heating, rapid temperature rise and good uniformity.

3. Made of high-quality stainless steel, the surface has been physically and chemically polished to ensure cleanliness.

4. Comes with self-cleaning function - high-temperature cleaning.

Control system: The human-machine interface uses a touch screen, the core controller uses an embedded controller, the over-temperature protection is an independent detection device with oxygen content detection function, the motion control is a servo/stepper control unit, and the transmission is a professional wafer transfer robot , the software has functions such as temperature control, atmosphere control, process editing, data recording, chart display, etc.

In the future, Zhenping will continue to strengthen technological leadership and provide high-quality product solutions and services to industry customers with its professional advantages.

As a professional equipment manufacturer, Zhenping Technology can customize satisfactory products according to customer needs. For details of customers in need, please contact 400-608-2908 or search Zhenping Technology for more information.